XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
By SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Air pressure applied to pilot port shifts piston-coupled valve
- Replaceable bellows reduces maintenance cost and waste material
- Additional maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4 directions
- Optional 100°C and 150°C heaters (UL compliant lead wire)
Documents
Why Proax for SMC XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal?
Proax is the Elite distributor of SMC XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal. We are SMC's largest distributor in Canada. Our highly skilled in-house technical team is ready to assist with any technical needs.
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