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XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

SMCOfficial Distributor

By SMC

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Replaceable bellows reduces maintenance cost and waste material
  • Additional maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)
Configure Product
Partial
Series Catalog
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Flange Type Configuration Status
Port Direction Configuration Status
Temperature Configuration Status
Version Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
X152 Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Why Proax for SMC XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal?

Proax is the Elite distributor of SMC XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal. We are SMC's largest distributor in Canada. Our highly skilled in-house technical team is ready to assist with any technical needs.

Have a question in mind? to help you get the right etech as quickly as possible for your project. We're always here to help!

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