XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed.  The spring an shaft are exposed to gas flow, but a scraper and O-ring seal the piston pressure volume from process gases.  The XLFV opens when pressure is applied at the pilot port, which is controlled by a body mounted solenoid valve.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and an electroless nickel plated steel spring.  The XLFV bellows are 316L stainless steel.  Numerous seal material are available for a wide range of chemical compatibility.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals