XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The vavle opens when pressure is applied at the pilot port.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows.  Numerous seal materials are available for a wide range of chmical compatibility.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals