All Pneumatics Process Gas Equipment Pressure Regulators Pressure Reducing Pneumatic Adjust AZ

AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)

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Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

Actuation control pressure isolated from process gas by two seals
Body material: 316L SS secondary remelt
High inlet pressure type: Standard Max. 2300 psig (15.9 MPa); HR: Max. 3000 psig (20.7MPa)
Flow capacity: Standard to 400 slpm
Ni-Cr-Mo alloy internals available for corrosion resistance
100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

Documents

Series Catalog

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Series Catalog

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	Select values from the drop down lists or make appropriate selections to configure the part number.
Surface Finish
Ports
Connections, Inlet
Connections, Outlet
Gauge Port, Inlet
Gauge Port, Outlet
Pressure Gauge Unit
Seat Material
Option
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

Why Proax for SMC AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)?

Proax is the Elite distributor of SMC AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm). We are SMC's largest distributor in Canada. Our highly skilled in-house technical team is ready to assist with any technical needs.

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