All Pneumatics Process Gas Equipment Pressure Regulators Pressure Reducing Pneumatic Adjust AZ

AZ10PA, Pneumatic Actuation Pressure Regulator, Low Flow

Official Distributor

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

Actuation control pressure isolated from process gas by two seals
Body material: 316L SS
High inlet pressure type: Standard Max. 3500 psig (24.1 MPa)
Flow capacity: Standard to 30 slpm; HF to 120 slpm
Ni-Cr-Mo alloy internals available for corrosion resistance
100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

Documents

Series Catalog

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Partial

Series Catalog

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	Select values from the drop down lists or make appropriate selections to configure the part number.
Material
Surface Finish
Ports
Connections, Inlet
Connections, Outlet
Gauge Port, Inlet
Gauge Port, Outlet
Pressure Gauge Unit
Seat Material
Flow Specification
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

Why Proax for SMC AZ10PA, Pneumatic Actuation Pressure Regulator, Low Flow?

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