All Pneumatics Process Gas Equipment Pressure Regulators Pressure Reducing Manual Adjust SL

SL5200, Single Stage Compact Regulator for Ultra High Purity

Official Distributor

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

For UHP gas delivery
Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
Body material: 316L SS secondary remelt
Hastelloy® internals available for corrosion resistance
Sub-atmospheric pressure delivery option

Documents

Series Catalog

Configure Product

Partial

Series Catalog

Select Product Options

	Select values from the drop down lists or make appropriate selections to configure the part number.
Delivery Pressure
Material
Surface Finish
Range Options
Ports
Connections, Inlet
Connections, Outlet
Gauge Port, Outlet
Pressure Gauge Unit
Seat Material
Flow Specification
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

Why Proax for SMC SL5200, Single Stage Compact Regulator for Ultra High Purity?

Proax is the Elite distributor of SMC SL5200, Single Stage Compact Regulator for Ultra High Purity. We are SMC's largest distributor in Canada. Our highly skilled in-house technical team is ready to assist with any technical needs.

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