E32 Vacuum Resistant Fiber Sensor Heads
Vacuum-resistant fiber heads and flanges are sealed to prevent gas leakage into vacuum areas
By Omron
For vacuum applications in clean, hot environments the vaccuum resistant fibers and connecting flanges provide a long operational lifetime and vaccuum integrity.
- Leakage rate of 1x10-10 Pa*m3/s max
- Heat resistance up to 200°C
- Detergent resistant fluororesin or stainless steel fiber sheath
For the detection of wafers in non-vacuum environments, see E32 Special application.
Vacuum resistance
The vacuum resistant fiber heads and flanges are sealed to prevent gas leakage into vacuum areas.
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