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Auto Switch & Connector

F (2 pcs D-A93 w/D-sub Connector)

A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

C (2 pcs D-A93 w/Multiple Connector)

None

Gate O-ring Material

1 (FKM)

2 (Kalrez® 4079)

Opening Window Size

50336 (50x336, Applicable Wafer Size 300mm)

46236 (46x236, Applicable Wafer Size 200mm)

32222 (32x222, Applicable Wafer Size 200mm)

Type

High Vacuum Slit Valve

P (Parallel Seal Slit Valve)

Valve Size

31 (One Axis Bellows, Applicable Wafer Size 300mm)

22 (Two Axes Bellows, Applicable Wafer Size 200mm)

Valve Type

2 (Cassette Type Standard)

3 (Cassette Type Half MESK)

1 (Non-Cassette Type)

4 (Cassette Type Full MESK)

XGT223-46236-1C

HIGH VACUUM VALVE, High Vacuum Slit Valve

XGT311-50336-1F

XGT222-32222-1

XGT222-46236-2

XGT224-46236-1F

XGT311-50336-1C

XGT313-50336-1F

XGT311-50336-2A

Pneumatics

Vacuum Products

High Vacuum Products

Slit Valves