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Body Class

4 (ø10 Orifice)

2 (ø4 Orifice)

2 (Class 2, Orifice ø4)

3 (ø8 Orifice)

5 (ø16 Orifice)

3 (Class 3, Orifice ø8)

6 (ø22 Orifice)

4 (Class 4, Orifice ø12)

5 (Class 5, Orifice ø20)

Class 2

3 (Orifice Diameter ø8)

6 (Class 6, Orifice ø22)

Class 4

Class 3

2 (Orifice Diameter ø4)

2 (Orifice Dia. ø4)

3 (Orifice Dia. ø8)

4 (Orifice Dia. ø10)

4 (Orifice Diameter ø10)

Fitting Size

13 (1/2")

07 (1/4")

19 (3/4" or ø19)

13 (Tubing O.D. 1/2)

11 (3/8")

25 (1" or ø25)

07 ( Tubing O.D. 1/4)

25 (Tubing O.D. 1)

19 (Tubing O.D. 3/4)

11 (Tubing O.D. 3/8)

03 (ø3)

12 (ø12)

06 (ø6)

Fitting Type

S (LQ2, Body Class: 2, 3, 4, 5)

S (LQ2 Body Class: 2, 3, 4, 5)

V (LQ1, Body Class: 2, 3, 4, 5, 6)

Z (LQ3)

D (w/Double Ferrule Fittings)

V (LQ1)

G (w/Metal Gasket Seal Fittings)

T (Integrated Tubing)

Material

C (Body: PFA, Endplate: PPS, Diaphragm: PTFE)

Body PFA, Actuator Endplate PPS, Diaphragm PTFE

A (Body: SUS, Endplate: PPS, Diaphragm: PTFE)

B (Body: PPS, Endplate: PPS, Diaphragm: PTFE)

Standard

F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

N (Body: PFA, Endplate: PPS, Diaphragm: EPR)

D (Body: SUS, Endplate: PPS, Diaphragm: NBR)

C (Body: PFA, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)

A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

F (Body: PFA, Endplate: PVDF, Diaphragm: PTFE)

E (Body: SUS, Endplate: PPS, Diaphragm: EPR)

H (Body: PPS, Endplate: PPS, Diaphragm: EPR)

ND (Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE)

B (Body: PPS, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)

F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE)

G (Body: PPS, Endplate: PPS, Diaphragm: NBR)

Option

None

1 (Flow Rate Adjustment)

4 (Indicator)

1 (With Flow Rate Adjustment)

1 (w/Flow Rate Adjustment)

2 (With By-Pass)

3 (Flow Rate Adjustment & By-pass)

2 (By-pass)

N (For Ammonium Hydroxide)

K (Buffer Material FFKM)

Option 1

9 (High Back Pressure w/Indicator)

6 (High Back Pressure w/Flow Rate Adjustment)

5 (High Back Pressure, 0.42 MPa)

7 (High Back Pressure w/By-pass)

8 (High Back Pressure w/Flow Rate Adjustment & By-pass)

24 (Indicator & By-pass)

5 [High Back Pressure (0.5 MPa) Tolerant]

9 (High Back Pressure with Indicator)

Option 2

J (for High Temperature)

N (for Ammonium Hydroxide)

P (High Flow Spec, LVQ6* Only)

Output Tube Size

Ports A & B Same Size

10 (ø10)

07 (1/4)

11 (3/8)

Pilot Connection

N (Thread Type 1/8"NPT)

LQ1 Integral Fitting, 1/8" (3mm)

R (Thread Type 1/8 Rc)

M (LQ1 Integral Fitting, 5/32" (4mm)

Pilot Port

Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8

N (Body Class 3, 4, 5, 6 - NPT 1/8")

Body Class 2 - M5 Thread; Body Class 3, 4, 5 - Rc1/8

N (Body Class 3, 4, 5 - NPT 1/8")

Pilot Port Direction

Direction 1

Pilot Port Thread

LQ3 Integral Fitting, 1/8" (3mm)

N (NPT)

ø6mm One-touch Fitting

N (NPT 1/8)

2 (M5 x 0.8)

M (LQ3 Integral Fitting, 4mm)

Pilot Port Thread Type

One Touch Fitting Class 1: ø4, Class 2~5: ø6

Rc 1/8

2 (M5X0.8)

M5x0.8 (or Rc 1/8)

Port Size

02 (1/4)

03 (3/8)

04 (1/2)

06 (3/4)

01 (1/8)

03 (3/8, Class 3)

02 (1/4, Class 2)

04 (1/2, Class 4)

10 (1)

06 (3/4, Class 5)

Specification

V (Vacuum)

Thread

R, Rc

Tube Size

S07 (1/4")

S13 (1/2")

03 (1/8" or ø3)

13 (1/2" O.D.)

07 (1/4" O.D.)

11 (3/8" O.D.)

08 (ø8)

19 (3/4" O.D.; Metric: 19 x 16)

S11 (3/8")

S06 (ø6)

S03 (1/8")

03 (Inch: 1/8" O.D.; Metric: 3 x 2)

S19 (ø19, 3/4")

Valve Type

0 (N.C.)

0 (Normally Closed)

1 (Normally Open)

1 (N.O.)

2 (Double Acting)

Z (Pilot Port Thread 1/8)

LVQ30H-Z11N-4

HIGH PURITY CHEMICAL VALVE, HIGH PURITY CHEMICAL LIQUID VALVE

LVQ30-S0711N-4

LVQ30-S07N-3

LVQ30-S07N-6

LVQ30-S11R-1

LVQ30-Z07N-1

LVQ30-Z11-1

LVQ30-Z11N-1

LVQ31-Z07N

LVQ400-Z13

HIGH PURITY CHEMICAL VALVE, VIPER VALVE, JPN SPL

LVQ40H-Z13N

LVQ40-S1211

LVQ40-S13R

LVQ40-S13R-1

LVQ40-S13R-4

LVQ40S-S13N-4

LVQ40S-S13N-5

LVQ40S-Z13

LVQ40S-Z13N

LVQ40S-Z13N-1

Pneumatics

Directional Control Valves

Air Operated Valves

High Purity

High-Purity Air Operated Valves