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Actuation

1 (2 Position Single)

2 (2 Position Double)

3 (3 Position Closed Center)

4 (3 Position Exhaust Center)

5 (3 Position Pressure Center)

2 (Normally Open)

1 (Normally Closed)

Actuation Type

A (N.C., Normally Closed)

B (N.O., Normally Open)

4 (3 Position Exhaust center)

Body

4 (Base Mounted)

2 (Body Ported)

6 (Orifice Size ø22)

4 (Orifice Size ø12)

2 (Orifice Size ø6)

Body Class

4 (ø10 Orifice)

2 (ø4 Orifice)

2 (Class 2, Orifice ø4)

3 (ø8 Orifice)

5 (ø16 Orifice)

3 (Class 3, Orifice ø8)

6 (ø22 Orifice)

4 (Class 4, Orifice ø12)

5 (Class 5, Orifice ø20)

Class 2

3 (Orifice Diameter ø8)

6 (Class 6, Orifice ø22)

Class 4

Class 3

2 (Orifice Diameter ø4)

2 (Orifice Dia. ø4)

3 (Orifice Dia. ø8)

4 (Orifice Diameter ø10)

Bracket

None

F2 (w/Side Bracket)

w/o Bracket

F (Bracket)

F1 (w/Foot Bracket, 2 Position Single Only)

F (w/Bracket)

Fitting Size

13 (1/2")

07 (1/4")

19 (3/4" or ø19)

13 (Tubing O.D. 1/2)

11 (3/8")

25 (1" or ø25)

07 ( Tubing O.D. 1/4)

25 (Tubing O.D. 1)

19 (Tubing O.D. 3/4)

11 (Tubing O.D. 3/8)

03 (ø3)

12 (ø12)

06 (ø6)

Material

C (Body: PFA, Endplate: PPS, Diaphragm: PTFE)

Body PFA, Actuator Endplate PPS, Diaphragm PTFE

A (Body: SUS, Endplate: PPS, Diaphragm: PTFE)

B (Body: PPS, Endplate: PPS, Diaphragm: PTFE)

Standard

F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

N (Body: PFA, Endplate: PPS, Diaphragm: EPR)

D (Body: SUS, Endplate: PPS, Diaphragm: NBR)

C (Body: PFA, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)

A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

F (Body: PFA, Endplate: PVDF, Diaphragm: PTFE)

E (Body: SUS, Endplate: PPS, Diaphragm: EPR)

H (Body: PPS, Endplate: PPS, Diaphragm: EPR)

ND (Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE)

F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE)

B (Body: PPS, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)

G (Body: PPS, Endplate: PPS, Diaphragm: NBR)

Option

1 (Flow Rate Adjustment)

4 (Indicator)

1 (With Flow Rate Adjustment)

1 (w/Flow Rate Adjustment)

2 (With By-Pass)

3 (Flow Rate Adjustment & By-pass)

2 (By-pass)

K (Buffer Material FFKM)

N (For Ammonium Hydroxide)

Option 1

9 (High Back Pressure w/Indicator)

6 (High Back Pressure w/Flow Rate Adjustment)

5 (High Back Pressure, 0.42 MPa)

7 (High Back Pressure w/By-pass)

8 (High Back Pressure w/Flow Rate Adjustment & By-pass)

24 (Indicator & By-pass)

5 [High Back Pressure (0.5 MPa) Tolerant]

9 (High Back Pressure with Indicator)

Option 2

J (for High Temperature)

N (for Ammonium Hydroxide)

P (High Flow Spec, LVQ6* Only)

Pilot Port Direction

Direction 1

Upward

P (Lateral)

Pilot Port Thread

N (Thread Type 1/8"NPT)

R (Thread Type 1/8 Rc)

LQ3 Integral Fitting, 1/8" (3mm)

LQ1 Integral Fitting, 1/8" (3mm)

N (NPT)

N (NPT 1/8)

ø6mm One-touch Fitting

2 (M5 x 0.8)

M (LQ3 Integral Fitting, 4mm)

Piping

20 (Body Ported)

40 (Base Mounted)

0 (Side Ported)

0 (P Side) (A, B Side) (E Side)

42 (Base Mounted)

4 (w/o Sub-plate)

32 (4 Port/Base Mounted Common SUP Common EXH)

42 (Base Mounted Common SUP Common EXH)

41 (5 Port/Base Mounted Common SUP Common EXH)

20 (Body Ported/Common SUP Common EXH)

41 (Base Mounted Common SUP Common EXH)

41 (Base Mounted)

1 (Bottom Ported)

46 (5 Port/Base Mounted Common SUP Individual EXH)

42 (Base Mounted Common SUP Individual EXH)

Port Size

02 (1/4)

03 (3/8)

01 (1/8)

04 (1/2)

02 (1/4 Thread Piping or 1/4 w/Sub-plate)

01 (1/8 Thread Piping or 1/8 w/Sub-plate)

06 (3/4)

N7 (One-touch Fitting for ø1/4")

C8 (One-touch Fitting for ø8)

C6 (One-touch Fitting for ø6)

06 (3/4, 20A)

C4 (One-touch Fitting for ø4)

03 (3/8 w/Sub-plate)

w/o Sub-plate

N11 (One-touch Fitting for 3/8")

10 (1)

04 (1/2, 15A)

M5 (M5x0.8)

03 (3/8, 10A)

Series

5 (VFA5000)

3 (VFA3000)

342 (VPA300)

542 (VPA500)

742 (VPA700)

SYJA7

344 (VPA300)

544 (VPA500)

744 (VPA700)

SYJA5

6 (ø22mm)

5 (ø16mm)

1 (VFA1000)

Specification

V (Vacuum)

Thread

T (NPTF)

F (G)

R, Rc

00N (NPT)

00T (NPTF)

Thread type

Valve Type

0 (N.C.)

0 (Normally Closed)

1 (Normally Open)

1 (N.O.)

For Ordinary Pressure

2 (Double Acting)

V (For Vacuum and Low Pressure)

Z (Pilot Port Thread 1/8)

VPA744-1-A

3 PORT AIR-PILOTED VALVE, Air piloted poppet valve

SYA3220-C6-F2

4/5 PORT AIR-PILOTED VALVE, VALVE, AIR PILOT, BODY PT

SYJA3120-M3-F

4/5 PORT AIR-PILOTED VALVE, VALVE, AIR, BODY PT

SYJA5320-M5

4/5 PORT AIR-PILOTED VALVE, VALVE, AIR PILOT

LVQ60-Z25R-9

HIGH PURITY CHEMICAL VALVE, HIGH PURITY CHEMICAL LIQUID VALVE

VVPA450-041-04-T

VPA3165V-12

3 PORT AIR-PILOTED VALVE, VALVE, AIR PILOT

VPA542-1-03B-F

Directional Control Air Operated Valves